PSM1000
The PSM1000 is an OEM-ready microscope with the best possible imaging performance for flat, reflective samples. Metallurgical workpieces and semiconductors are reproduced impressively by the plan-apochromatic LWD lenses. The large field of view with upright image allows quick orientation and easy manipulation. Each position of the objective turret can be centred individually. This means that details remain perfectly "in the picture" when changing magnification. The use of optional lenses with parfocal compensation eliminates the need for refocusing. The high transmission of the lenses, including tube lenses for NUV (355 nm) to NIR (1064 nm), allows the PSM1000 to be integrated into wafer inspection systems. The small step size of the fine focus allows the finest adjustment of the focus plane even at high magnifications.
Standard system specifications:
Optical concept: Optics with transmission from NUV to NIR
Observation tube: Trinocular tube, Siedentopf type
Viewing angle: 30º viewing angle
Beam splitting in trinocular tube: Switchable 50:50/0:100 Visual: Camera output
Eye relief: 55-75 mm
Diopter adjustment: On both eyepieces +/- 5 dpt
Eyepieces: Wide field WF10X/24 mm, with diopter adjustment
Intermediate tube: 3-fold tube lens revolver with 1X UV/VIS (355-532 nm), 1X IR/VIS (532-1064 nm), 2X
Objective turret: 4-fold, individually centred positions
Lens quality: Extra LWD Plan Apochromatic
Objectives/magnification range: Optional
Objective thread: M26X0.706
Stand type: Optional
Focus: Coaxial coarse/fine adjustment, adjustability
Fine focus step size: 1 μm increment
Travel range in Z: 50 mm
Incident light: Port for coupling in coaxial lighting
Accessories included: Laser safety accessories, spacer discs
Dimensions: LxWxH 333x218x277 mm
